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Dual Beam - Focused Ion Beam (Dual Beam - FIB) uses a focused ion beam (usually Gallium) for nano-scale milling or sputtering of samples with simultaneous SEM imaging of the modified area. The Dual Beam-FIB technique has many applications in emerging semiconductor and nano-technology sectors and all the tests related to this technique are offered by Infinita Lab network of testing labs, USA, to our clients.... Read More
A focused ion beam (FIB) system uses ions (usually Gallium), operated at sufficiently high beam current, focused upon specific areas of a sample, for sputtering or milling, at nanometre scale precision. When FIB is combined with Scanning Electron Microscopy (SEM) it forms a dual beam system that can simultaneously accomplish nano-scale milling and high-resolution imaging using emitted electrons.
This technique combines the precise nano-milling capabilities of FIB with the imaging capabilities of SEM. In a typical Dual Beam – FIB system the electron and ion beams intersect at a 52° angle at proximity to the sample surface. This enables the detection of electrons by SEM as soon as they are emitted from an FIB milling location, providing simultaneous high resolution SEM imaging. The Dual Beam-FIB technique has many applications in emerging semiconductor and nano-technology sectors, ranging from preparation of ultra-thin or ultra-sharp TEM/APT samples in 50nm-100 nm range, nano-component fabrication by FIB milling, to building nanostructures by chemical vapor deposition.
Common Uses of Dual Beam – FIB
Advantages of Dual Beam – FIB
Limitations of Dual Beam – FIB
Industrial Applications of Dual Beam – FIB
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The Dual Beam-FIB technique has many applications in emerging semiconductor and nano-technology sectors, ranging from preparation of ultra-thin or ultra-sharp TEM/APT samples in the 50nm-100nm range, nano-component fabrication by FIB milling, to building nanostructures by chemical vapor deposition.
Dual-beam scanning electron microscopy is a combination of FIB (Focused Ion Beam) and SEM (Scanning Electron Microscopy). The technique is used to carry out a three-dimensional structural analysis of a specimen.
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