Rutherford Backscattering Spectrometry – RBS
Rutherford Backscattering Spectrometry (RBS) is a widely used ion scattering analytical technique used to determine theelemental composition profile and depth of thin films. RBS is a non-destructive technique frequently used in a testing lab for thin-film semiconductor material stacks and for determining the concentration of trace elements heavier than the major constituents of the substrate. ... Read More