Total Reflection X-ray Fluorescence (TXRF)
Total Reflection X-rays Fluorescence (TXRF) utilizes total reflection of incident primary X-Rays, to enhance the intensity of Secondary (Fluorescent) X-rays emitted from a thin sample, placed on a polished carrier. This enables trace and ultra-trace elemental surface analysis of thin sample layers.

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- Overview
- Scope, Applications, and Benefits
- Test Process
- Specifications
- Instrumentation
- Results and Deliverables
Overview
Total Reflection X-ray Fluorescence (TXRF) is a highly sensitive analytical technique used for trace elemental analysis of liquids, solids, and thin films. It operates on the principle of total external reflection of X-rays at very low incident angles, minimizing background noise and enabling detection of elements at ultra-trace levels.
TXRF is widely used in environmental analysis, semiconductor manufacturing, pharmaceuticals, and material science for accurate quantification of elemental composition. Its ability to analyze very small sample volumes with minimal preparation makes it an efficient and reliable method for high-precision elemental characterization.

Scope, Applications, and Benefits
Scope
Total Reflection X-ray Fluorescence enables qualitative and quantitative elemental analysis at trace levels using low-angle X-ray excitation and fluorescence detection.
- Applicable to liquids, solids, and thin films
- Detects trace and ultra-trace elemental concentrations
- Supports multi-element analysis simultaneously
- Requires minimal sample preparation
- Ensures compliance with analytical standards
Applications
- Environmental water and soil analysis
- Semiconductor contamination analysis
- Pharmaceutical elemental testing
- Food and beverage analysis
- Material purity and trace element detection
Benefits
- Extremely high sensitivity for trace elements
- Requires very small sample volume
- Minimal sample preparation needed
- Non-destructive analytical technique
- Enables multi-element detection in a single run
Test Process
Sample Preparation
A small amount of sample is deposited onto a sample carrier and dried to form a thin layer.
1Instrument Setup
The TXRF instrument is calibrated and aligned for low-angle X-ray incidence.
2X-ray Excitation
The sample is irradiated with X-rays under total reflection conditions to generate fluorescence.
3Detection & Analysis
Emitted fluorescence is detected and analyzed to determine elemental composition and concentration.
4Technical Specifications
| Parameter | Details |
|---|---|
| Detection limit | ppb to ppm levels |
| Sample volume | Typically a few microliters |
| Elements detected | Broad range (Na to U) |
| Measurement type | Qualitative and quantitative analysis |
| Excitation source | X-ray tube |
| Angle of incidence | Below critical angle for total reflection |
| Output | Elemental spectra and concentration values |
Instrumentation Used for Testing
- TXRF spectrometer
- X-ray source (X-ray tube)
- Sample carriers (quartz/glass reflectors)
- Detector (silicon drift detector)
- Data analysis software
Results and Deliverables
- Elemental composition and concentration data
- Trace element detection results
- Spectral analysis graphs
- Quantitative analysis report
- Compliance and interpretation report
Why Choose Infinita Lab for Total Reflection X-ray Fluorescence?
At the core of this breadth is our network of 2,000+ accredited labs in the USA, offering access to over 10,000 test types. From advanced metrology (SEM, TEM, RBS, XPS) to mechanical, dielectric, environmental, and standardized ASTM/ISO testing, we give clients unmatched flexibility, specialization, and scale. You’re not limited by geography, facility, or methodology—Infinita connects you to the right testing, every time.
Looking for a trusted partner to achieve your research goals? Schedule a meeting with us, send us a request, or call us at (888) 878-3090 to learn more about our services and how we can support you. Request a Quote
Frequently Asked Questions
TXRF is an analytical technique used to detect and quantify trace elements in samples. It uses low-angle X-ray reflection to minimize background noise, allowing highly sensitive and accurate elemental analysis.
TXRF can analyze liquids, solids, and thin films. It is especially useful for samples requiring trace element detection with minimal preparation and very small sample volumes.
TXRF minimizes background interference by using total reflection geometry, which enhances signal detection. This allows accurate measurement of very low concentrations of elements in a sample.
An internal standard is added to the sample to improve accuracy and quantification. It helps correct variations in measurement conditions and ensures reliable concentration results.
Factors include sample preparation, uniformity of the deposited layer, calibration, and instrument settings. Proper handling ensures accurate and reproducible elemental analysis results.
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