Optical Interferometry / Profilometry
Optical interferometry and Profilometry method
The WYKO RST Plus surface profiling device from Infinita lab provides accurate surface texture characterization. A non-contact optical profiler called the RST Plus employs two technologies to measure a variety of surface properties. Vertical-scanning interferometry (VSI) mode can detect rough surfaces and steps at the nanoscale level to the micrometre level, whereas phase-shifting interferometry (PSI) mode can measure smooth surfaces at the Angstrom level. Unlike stylus-type profilers, which only provide roughness over a single line, the RST Plus produces 3D and 2D surface profiles over an area.
The optical interferometer is a superb metrology tool for measuring surface texture and roughness on:
- Precise machining of the surfaces
- Built-in optical circuits
- Waveguides
- Fibres and optics
- Ceramics sThin-films
- MEMS technology as well as many other industrial measurements
Optical profiler surface measurement parameters available:
- Roughness Average (Ra)
- Root Mean Square (Rq) (RMS) Maximum profile peak height and maximum profile valley depth are known as roughness Rp, Rv.
- Rt, Rsk, Rku, Pc, and more have profiles with an average maximum height of Rz.
