Residual Gas Analysis (RGA) Testing for Vacuum & Sealed Component Outgassing
Residual Gas analysis (RGA) is commonly done for hermetically sealed microelectronic devices, to detect moisture and other damaging volatile or gaseous compounds in the device cavity. The residual gases released upon controlled heating of a pierced hermetic device are analyzed by mass spectrometry.
TRUSTED BY
- Overview
- Scope, Applications, and Benefits
- Test Process
- Specifications
- Instrumentation
- Results and Deliverables
Residual Gas Analysis (RGA) Testing Overview
Residual Gas Analysis (RGA) is an analytical technique used to identify and quantify gases present in vacuum systems or sealed environments. It is based on mass spectrometry principles, in which gas molecules are ionized and analyzed by their mass-to-charge ratio to determine composition.
RGA is widely used for monitoring vacuum quality, detecting leaks, and identifying contaminants such as water vapor, hydrocarbons, and process gases. It provides highly sensitive detection of trace gases at very low pressures, making it essential for semiconductor, aerospace, and high-vacuum applications.
Scope, Applications, and Benefits
Scope
Residual Gas Analysis evaluates:
- Composition of gases in vacuum systems
- Partial pressure of individual gas species
- Trace contamination and impurities
- Leak detection and outgassing behavior
- Process gas monitoring and control
Applications
- Semiconductor manufacturing and vacuum chambers
- Aerospace and space systems
- Thin film deposition (PVD, CVD)
- Vacuum furnace and coating processes
- Electronics and hermetic packaging
Benefits
- High-sensitivity detection of trace gases
- Real-time monitoring of vacuum environments
- Identifies contamination sources and leaks
- Supports process control and optimization
- Improves product reliability and performance
Residual Gas Analysis (RGA) Test Process
Sample Introduction
Gas from vacuum chamber or sealed system is introduced into the analyzer.
1Ionization
Gas molecules are ionized using electron impact from a filament source.
2Mass Separation
Ions are separated based on mass-to-charge ratio using a quadrupole mass filter.
3Data Analysis
Ion signals are recorded to generate a mass spectrum identifying gas composition.
4Residual Gas Analysis (RGA) Technical Specifications
| Parameter | Details |
|---|---|
| Standard | MIL-STD-883 Method 1018 (moisture content), internal methods |
| Pressure Range | ~10⁻⁴ to 10⁻¹⁴ Torr detection capability |
| Mass Range | Typically up to ~100–300 amu |
| Detection Limit | Trace level (sub-ppm) |
| Ionization Method | Ionization Method |
| Measured Outputs | Partial pressure, gas composition |
| Applicable Systems | Vacuum chambers, sealed devices |
Instrumentation Used for Testing
- Residual Gas Analyzer (quadrupole mass spectrometer)
- Ion source (hot cathode filament)
- Quadrupole mass filter
- Electron multiplier/detector
- Vacuum system and pumps
- Data acquisition and analysis software
Results and Deliverables
- Mass spectrum of gases (amu vs intensity)
- Identification of gas species
- Partial pressure distribution
- Contamination and leak detection analysis
- Process monitoring and diagnostic report
Partnering with Infinita Lab for Optimal Results
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Looking for a trusted partner to achieve your research goals? Schedule a meeting with us, send us a request, or call us at (888) 878-3090 to learn more about our services and how we can support you. Request a Quote
Frequently Asked Questions
RGA, or Residual Gas analysis, testing is commonly performed on hermetically sealed microelectronic devices to detect moisture and other damaging volatile or gaseous compounds in the device cavity.
The common uses of RGA are: It can perform moisture and gaseous component analysis of hermetically sealed microelectronic devices, It can also perform vacuum leak testing and residual gas analysis on ultra-high vacuum equipment.
Mass spectrometry analyzes the gaseous components released from the device in RGA. It also measures the mass-to-charge ratio of ions to identify and quantify different gases present in the sample.
Industries such as semiconductors, aerospace, electronics, vacuum coating, and research laboratories use RGA testing to monitor gas composition, detect leaks, and ensure clean and controlled environments.
RGA testing helps detect contamination, identify leaks, and monitor vacuum quality, ensuring reliable process control and improved performance in high-precision manufacturing and research applications.
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