Guide to Scanning Electron Microscopy (SEM): Principles, Applications & Testing Solutions

Scanning electron microscopy (SEM) is a surface analysis method that is widely used to determine the surface characteristics of sub-micron sized particles. With the diminishing working scales of materials used in various industries like microelectronics, SEM has far-reaching applications like semiconductor inspections, microchip assembly, failure analysis, and quality control. Laboratory professionals at Infinita Lab guarantee the optimum application of the SEM technology for general and targeted testing of your products, providing the best performance, lower warranty costs, and high levels of customer satisfaction.

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    Guide to Scanning Electron Microscopy (SEM): Principles, Applications & Testing Solutions

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    • Overview
    • Scope, Applications, and Benefits
    • Test Process
    • Specifications
    • Instrumentation
    • Results and Deliverables

    Overview

    Scanning Electron Microscopy (SEM) is an advanced analytical surface technique used to study morphology, microstructure, and composition in materials at submicron to nanometer scales. SEM focuses electrons as a beam to produce high-resolution images and analytical data. It is becoming an indispensable technique for industries with decreasing material dimensions and tolerances, such as microelectronics, semiconductors, aerospace, and biomedical devices.

    It provides detailed information on surface topography, material defects, and elemental composition, thereby supporting quality control, failure analysis, and product optimization.

    Scope, Applications, and Benefits

    Scope

    SEM enables detailed characterization of solid materials by analyzing:

    • Surface morphology and topography (3D-like imaging)
    • Material contrast based on atomic number
    • Elemental composition through Energy-Dispersive X-ray Spectroscopy (EDS)

    It is suitable for conductive and non-conductive materials (with appropriate sample preparation) across a wide range of industrial and research applications.

    Applications

    • Semiconductor inspection and microchip assembly analysis
    • Failure analysis of electronic components and coatings
    • Evaluation of thin films and surface coatings
    • Identification of microstructures, inclusions, and contaminants
    • Corrosion and fracture analysis of metals and alloys
    • Polymer degradation and filler dispersion analysis
    • Mineral identification and ore quality assessment

    Benefits

    • Delivers ultra-high-resolution imaging beyond optical microscopy
    • Combines imaging with elemental and compositional analysis
    • Detects early-stage defects, reducing product failure and warranty costs
    • Supports product development, quality assurance, and root-cause analysis
    • Applicable across diverse industries from aerospace to biomedicine

    Test Process

    Specimen Preparation

    Solid samples are cleaned and, if non-conductive, coated with gold or carbon to prevent charging.

    1

    Electron Beam Scanning

    A focused electron beam scans the sample surface at controlled accelerating voltages (typically 0.1–30 kV).

    2

    Signal Detection

    Secondary electrons, backscattered electrons, and X-rays are detected using dedicated detectors.

    3

    Data Collection & Imaging

    Signals are processed to generate high-resolution images and elemental maps (EDS).

    4

    Technical Specifications

    ParameterDetails
    Imaging ResolutionDown to the nanometer scale
    Signal TypesSecondary electrons (SE), Backscattered electrons (BSE), X-rays (EDS)
    Sample StateSolid materials
    Accelerating VoltageTypically 0.1–30 kV

    Instrumentation Used for Testing

    • Scanning Electron Microscope with electromagnetic lenses
    • Secondary Electron (SE) detectors
    • Backscattered Electron (BSE) detectors
    • Energy-Dispersive X-ray Spectroscopy (EDS) system
    • Vacuum chamber and electron gun
    • Image acquisition and analytical software

    Results and Deliverables

    • High-resolution SEM images of surface morphology
    • Identification of cracks, pores, inclusions, and defects
    • Elemental composition and distribution maps (EDS)
    • Comparative analysis of material phases and contaminants
    • Failure analysis insights and quality assessment reports

    Case Studies

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    Frequently Asked Questions

    It is a high-resolution surface imaging technique that provides a magnified image of the sample scanned using electron beams.

    SEM is widely used in various fields including: Material Science, Biology, Electronics, Forensics, etc.

    SEM provides several advantages: High Resolution, Field Depth, Versatility.

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