Residual Gas Analysis (RGA)

Introduction:

Residual Gas analysis (RGA) is commonly performed on hermetically sealed microelectronic devices to detect moisture and other damaging volatile or gaseous compounds in the device cavity. We analyze the residual gases released upon controlled heating of a pierced hermetic device using residual gas analysis mass spectrometry.

Scope of Residual Gas Analysis (RGA)

Engineers use Residual Gas Analysis (RGA) testing to ensure high reliability in microelectronic devices used in critical military, aerospace, medical, telecommunications, and industrial automation applications. For example, RGA measures the moisture content inside a metal or ceramic hermetically sealed microelectronic device using Method 1018.2 of MIL-STD-883D. Moisture can occur inside hermetic devices due to hydrogen evolving in the presence of nickel used in device packaging, reacting with reducible metal oxides to form water. In addition to moisture, using epoxies and other adhesives or polymeric materials in microelectronic devices can cause outgassing of volatile species due to insufficient curing.

RGA, or Residual gas analysis mass spectrometry, is also used in the process industry, as well as research equipment for vacuum leak testing in ultra-high vacuum systems. It allows us to directly determine the partial pressure of gaseous components from the measured gas composition.

The standard RGA test for hermetically sealed microelectronic devices involves placing the sample in a vacuum chamber connected by a transfer passage to a suitably calibrated mass spectrometer. We heat the chamber transfer passage and maintain it at specified temperatures. Then, we pierce the sample with a sharp piercing tool outside the vacuum chamber. The tool must be capable of piercing metallic and ceramic packages. The specimen’s internal gases, which are released, are then conveyed to the mass spectrometer for analysis. Most Mass spectrometers used in RGA utilize Quadrupole-type mass analyzers with a wide dynamic range of measurement.

Common Uses of Residual Gas Analysis (RGA)

• It can perform moisture and gaseous component analysis of hermetically sealed microelectronic devices.
• It can also perform vacuum leak and residual gas analysis testing on ultra-high vacuum equipment.

Advantages and Industrial Applications of Residual Gas Analysis (RGA)

The following are some of the advantages and applications associated with RGA:

Limitations of Residual Gas Analysis (RGA)

• The analysis by mass spectrometer requires three spectral data covering background, calibration, and sample spectra.
• Small devices may have only traces of moisture, which can mask external moisture leakage into the vacuum system.

Conclusion:

RGA is an essential test technique for reliability and quality in hermetically sealed microelectronic devices, especially within strategic applications, including aerospace, military, and biomedical applications. The moisture test and other volatile species by mass spectrometry within the RGA prevent device failures caused by internal contamination. It is a destructive test, and its preparation is compassionate; it requires meticulous calibration. Furthermore, the ability of the test to detect deficient concentrations of gases makes this test very important in quality control and vacuum process management. Infinita Lab brings extensive experience in RGA testing and guarantees the accuracy and reliability of results to support the highest standards of product performance and safety.

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