Glow Discharge Mass Spectrometry (GD-MS)

Glow Discharge Mass Spectrometry (GDMS) utilizes Argon plasma generated in a Glow Discharge Vacuum chamber, to ionize the solid sample, for mass spectrometric micro-analysis of elements and inorganic species. Infinita Lab, USA, offers this test to clients in the USA and across the world through its laboratory network.

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Overview
Scope, Applications, and Benefits
Test Process
Specifications
Instrumentation
Results and Deliverables

Overview

Glow Discharge Mass Spectrometry (GD-MS) is an ultra-sensitive characterization technique for analyzing elements in a material. This technique is used for the direct analysis of trace elements and impurities in metallic and semiconductor solids at parts-per-billion and parts-per-trillion concentrations. The GD-MS technique provides a comprehensive range of elements across the periodic table in a single analysis, which is a great advantage for materials engineers, researchers, and quality engineers in obtaining definitive analyses of trace impurities and the composition of high-purity materials.

Scope, Applications, and Benefits

Scope

Directly, GD-MS uses a glow-discharge plasma source to sputter the surface of the solid sample, atomizing and ionizing it for injection into the mass spectrometer for direct analysis of solid materials without the need for acid digestion or complicated sample preparation techniques.

GD-MS analysis evaluates:

Ultra-trace elemental impurity content in high-purity metals, alloys, and semiconductor materials
Bulk elemental composition and major, minor, and trace element quantification across the periodic table
Metallic and non-metallic impurity analysis in electronic, aerospace, and advanced material systems
Depth profile elemental distribution analysis across surface and near-surface material layers
Compliance with material purity and elemental composition specification requirements

Applications

High-purity metals and target materials for semiconductor and electronic device manufacturing
Aerospace and defense alloys requiring ultra-trace impurity characterization and certification
Nuclear and energy materials requiring comprehensive bulk elemental purity analysis
Semiconductor substrates, sputtering targets, and electronic-grade materials
Advanced material research programs requiring ultra-sensitive bulk elemental characterization

Benefits

Delivers ultra-sensitive trace elemental analysis at parts-per-billion and parts-per-trillion levels
Provides direct solid sample analysis without acid dissolution or complex sample preparation
Identifies trace impurities across the full periodic table within a single analytical run
Delivers traceable, laboratory-certified elemental data for material
Reduces material risk by detecting trace impurity levels early in the qualification cycle

Test Process

Sample Preparation

Solid specimens sectioned, surface-cleaned, and mounted within glow discharge source.

Glow Discharge Sputtering

Argon plasma sputters sample surface atomizing and ionizing material for mass spectrometric detection.

Mass Spectrometric Detection

Ionized material separated and detected generating elemental mass spectra for quantification.

Data Analysis & Reporting

Mass spectral data processed to generate elemental composition profiles and test compliance result.

Technical Specifications

Parameter	Details
Applicable Materials	High-purity metals, alloys, semiconductors, sputtering targets, electronic grade materials
Analytical Technique	Glow discharge plasma sputtering with high-resolution mass spectrometric detection
Detection Capability	Ultra-trace elemental detection at parts-per-billion to parts-per-trillion levels
Measured Parameters	Full periodic table elemental composition and trace impurity concentration
Measured Outputs	Elemental composition profile, trace impurity concentrations, test compliance result

Instrumentation Used for Testing

High-resolution GD-MS system with glow discharge ionization source and mass spectrometric detection
Argon plasma glow discharge sputtering source for direct solid sample atomization
Elemental reference standards for quantitative calibration and method validation
Specialist mass spectral data acquisition and elemental quantification software
Sample preparation equipment for specimen sectioning, cleaning, and geometry preparation
Data reporting and elemental composition visualization system

Results and Deliverables

Full elemental composition profile across the periodic table for all analyzed specimens
Trace impurity concentration data at parts-per-billion and parts-per-trillion detection levels
Mass spectral identification data for all detected elemental species
Test compliance result assessed against the defined material purity and composition specification criteria
GD-MS analytical report

Partnering with Infinita Lab for Optimal Results

Infinita Lab addresses the most frustrating pain points in the Glow Discharge Mass Spectrometry (GD-MS) testing process: complexity, coordination, and confidentiality. Our platform is built for secure, simplified support, allowing engineering and R&D teams to focus on what matters most: innovation. From kickoff to final report, we orchestrate every detail—fast, seamlessly, and behind the scenes.

Looking for a trusted partner to achieve your research goals? Schedule a meeting with us, send us a request, or call us at (888) 878-3090 to learn more about our services and how we can support you. Request a Quote

Frequently Asked Questions

GD-MS is an ultra-sensitive method for elemental characterization that directly analyzes a wide variety of solid materials using glow discharge plasma sputtering and mass spectrometric detection, providing detailed trace impurity and bulk composition data at parts-per-billion and parts-per-trillion levels.

GD-MS is used to detect and quantify metallic and non-metallic elemental impurities at parts-per-billion to parts-per-trillion concentrations across the entire periodic table. It is the preferred method for ultra-high-purity material characterization .

Schematic of the fundamental processes in a glow discharge. Typical discharge conditions used for GDMS are about 1 kV discharge voltage, an argon gas pressure in the order of 1 torr, and a d.c. Discharge current in the mA range.

Glow discharge plasmas offer several advantages. The plasma works at sufficiently low temperatures (kinetic temperatures in the range of 100-500K) to prevent the dissociation of the molecular species.

Mass spectrometry (MS) is an analytical technique that separates ionized particles such as atoms, molecules, and clusters by using differences in the ratios of their charges to their respective masses (mass/charge; m/z).