Electron Beam Induced Current (EBIC)

Electron Beam Induced Current (EBIC) is a semiconductor analysis technique utilizing SEM or STEM to create electron-hole pairs and measuring the variable induced currents (EBIC) at p-n or Schottky junctions, or defect locations. Infinita Lab offers this test to clients in the USA and across the world, utilizing its large laboratory network.

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    Electron Beam Induced Current (EBIC)

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    • Overview
    • Scope, Applications, and Benefits
    • Test Process
    • Specifications
    • Instrumentation
    • Results and Deliverables

    Overview

    Electron Beam Induced Current is an advanced characterization technique used to study electrical activity and defects in semiconductor materials. It works by scanning a focused electron beam over a sample and measuring the induced current generated within the material.

    This technique is widely used in the semiconductor, electronics, and materials science industry to analyze junction properties, carrier recombination, and defect distribution in devices such as diodes, transistors, and solar cells. EBIC provides high-resolution insight into electrical behavior at the micro and nanoscale, making it essential for failure analysis and device optimization.

    Scope, Applications, and Benefits

    Scope

    EBIC analysis evaluates electrical response and defect activity in semiconductor materials using electron beam interaction.

    It helps identify recombination sites, junction behavior, and material inconsistencies.

    • Semiconductor defect characterization
    • Junction property evaluation
    • Carrier recombination analysis
    • Electrical activity mapping
    • Failure analysis
    • Device performance assessment
    • Quality control and validation

    Applications

    • Semiconductor device analysis
    • Solar cell characterization
    • Integrated circuit inspection
    • Failure analysis of electronic components
    • Research and material development

    Benefits

    • High-resolution electrical mapping
    • Detects micro and nano-scale defects
    • Improves device performance
    • Supports failure analysis
    • Enhances material quality
    • Enables precise diagnostics
    • Aids advanced research

    Test Process

    Sample Preparation

    Semiconductor sample is prepared with electrical contacts for current collection.

    1

    Electron Beam Scanning

    Focused electron beam scans the sample surface in a controlled pattern.

    2

    Current Generation

    Electron interaction generates charge carriers collected as induced current.

    3

    Mapping and Analysis

    Current signals are mapped to identify defects and junction behavior.

    4

    Technical Specifications

    ParameterDetails
    Material TypeSemiconductor materials and devices.
    Measured ParameterInduced current signal.
    ResolutionMicro to nanoscale spatial resolution.
    Operating EnvironmentVacuum conditions in SEM chamber.
    Signal DetectionSensitive current amplifiers.
    Temperature ConditionAmbient or controlled temperature.

    Instrumentation Used for Testing

    • Scanning Electron Microscope (SEM)
    • EBIC detector system
    • Current amplifier
    • Sample stage with electrical contacts
    • Data acquisition system
    • Vacuum chamber

    Results and Deliverables

    • EBIC current maps
    • Defect location identification
    • Junction behavior analysis
    • Carrier recombination data
    • Device performance insights
    • Test documentation
    • Final technical report

    Why Choose Infinita Lab for EBIC?

    With Infinita Lab (www.infinitalab.com), you are guaranteed a Nationwide Network of Accredited Laboratories spread across the USA, the best Consultants from around the world, Convenient Sample Pick-Up and Delivery, and Fast Turnaround Time. 

    Our team understands the stakes and subtleties of every test. Whether you’re validating a new Product, de-risking a prototype, or navigating complex compliance requirements, our specialists guide the process with rigor and clarity.  

    Looking for a trusted partner to achieve your research goals? Schedule a meeting with us, send us a request, or call us at (888) 878-3090  to learn more about our services and how we can support you. Request a Quote

    Frequently Asked Questions

    EBIC is a technique that uses an electron beam to generate and measure current in semiconductor materials, helping analyze electrical activity, defects, and junction properties in electronic devices and materials at very high spatial resolution.

    A focused electron beam scans the sample, generating electron-hole pairs that produce a measurable current. Variations in this current reveal defects, recombination sites, and electrical behavior across the material.

    It helps identify electrically active defects that may not be visible through standard imaging, enabling accurate root cause analysis of device failures.

    EBIC provides both spatial imaging and electrical information simultaneously, offering deeper insights into material behavior compared to purely structural imaging methods.

    Factors include beam energy, sample preparation, electrical contact quality, and material properties, all of which influence signal strength and accuracy.

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