Residual Gas Analysis RGA Testing Services

The common uses of RGA are: It can perform moisture and gaseous component analysis of hermetically sealed microelectronic devices, It can also perform vacuum leak testing and residual gas analysis on ultra-high vacuum equipment.

Mass spectrometry analyzes the gaseous components released from the device in RGA. It also measures the mass-to-charge ratio of ions to identify and quantify different gases present in the sample.

Industries such as semiconductors, aerospace, electronics, vacuum coating, and research laboratories use RGA testing to monitor gas composition, detect leaks, and ensure clean and controlled environments.

RGA testing helps detect contamination, identify leaks, and monitor vacuum quality, ensuring reliable process control and improved performance in high-precision manufacturing and research applications.

Residual Gas Analysis (RGA) identifies and measures gases inside vacuum systems or sealed components using mass spectrometry. Gas molecules are ionized and separated according to their mass-to-charge ratio, allowing gases such as nitrogen, oxygen, hydrogen, and water vapor to be detected and quantified.

Micro-RGA testing analyzes the gas composition inside very small sealed packages, such as microelectronic devices and MEMS components. The package is opened inside a controlled analysis chamber, releasing its internal gases for mass spectrometric measurement. This helps detect trace moisture and contaminants that may affect device reliability.

Internal Vapor Analysis (IVA) measures the types and concentrations of gases and vapors trapped inside hermetically sealed components. The package is opened under controlled conditions, and the released gases are analyzed using mass spectrometry. Results help evaluate moisture levels, sealing quality, and potential reliability issues such as corrosion.