A variety of microscopy and spectroscopy tools are available for precise measurements from the nano to the meter scale. Tools are used for chemical analysis, purity measurement, failure, root cause analysis, microstructure analysis, surface atomic layer analysis, etc. The use of the tool varies with the type of problem and the material system.
Below is a list of the most common types of analysis performed using these tools.
- Atomic-scale microscopy
- Elemental analysis by Secondary Ion Mass Spectrometry (SIMS)
- Composition by spectroscopy such as FTIR, Raman, XRF, OES
- Chemical analysis for contaminations, chemistry, and synthesis
- Trace element analysis using GD-MS, ICP-MS, ICP-OES, and LIBS
- Surface analysis and packaging defects by profilometry, SAM, 3D X-ray
- Materials characterization using XRD, EXAFS, XPS, XRR
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TEM is a powerful tool for imaging, spectroscopy, and diffraction analysis. It is possible to image the atomic arrangement of the materials (1-2 A resolution),
Secondary Ion Mass Spectroscopy or SIMS is a tool for composition analysis of metals, semiconductors, polymers, biomaterials, minerals, rocks, and ceramics.
Profilometry is the measurement of surface topography. It is used to measure surface roughness, coating thickness variation, flatness, surface curvature,