High-Resolution Transmission Electron Microscopy (HRTEM) Imaging of ALD Films.
Isotropic etch profiles are crucial for semiconductors. This case study done by Infinitalab reports highly accurate and statistically significant measurement of sub-nanometer level thickness variations to evaluate the etch profile uniformity of atomic layer deposited (ALD) films, by HRTEM imaging.
High-resolution TEM imaging of the trench cross-sections is used to reveal the etch profile of atomic layer deposited (ALD) films. Sub-nanometer level thickness variations can affect properties of ALD films and therefore highly accurate measurements across ALD films are required. We have developed an image processing program that can rapidly measure grayscale variations across these layers, precisely, down to a pixel. As many as 100 of such measurements are made across each trench and analyzed to accurately determine the average film thickness and the etch profile’s uniformity.
Sub-nanometer accuracy is achieved by making 100s of measurements at different locations of the trench. Since visually identifying the start and end location of the film can introduce errors, a semi-automatic method of picking out the start and the endpoint from the intensity profile (See Fig. 1) across the film is used. Average and standard deviations are plotted against location (Fig. 2) to provide a visual map of highly accurate and statistically significant sub-nanometer variations of the film for each trench.
Fig. 1. Cross-sectional TEM images of Al2O3 deposited and etched on 3D Si trench structures. Reference [1]
Fig. 2. An example of film thickness measurements on a trench. Each point is an average of 10 measurements. Error bars represent standard deviation.
Fig. 3. TEM of ALD film etch profile (a) top of the trench (b) Side of the trench. Reference [2]
Isotropic etch profiles are crucial in semiconductor wafers, PCB and IC manufacturing. Infinita Lab’s vast network of materials testing labs and experts enables us to produce reliable, reproducible, high-precision measurements in these smaller technology nodes using cutting-edge meteorology techniques.
[1] Isotropic plasma atomic layer etching of Al2O3 using a fluorine containing plasma and Al(CH3)3, Appl. Phys. Lett. 117, 162107 (2020)
[2] Status and prospects of plasma-assisted atomic layer deposition featured, Journal of Vacuum Science & Technology A 37, 030902 (2019)
ASTM E572 test method covers the analysis of stainless and alloy steels by Wavelength Dispersive X-ray Fluorescence Spectrometry (WDXRF). It provides rapid, multi-element determinations with sufficient accuracy to assure product quality.
The ASTM D2674 test is a standard test method for the analysis of sulfochromate etch solutions used in the surface preparation of aluminum. The ASTM D2674 standard specifies a method for determining the efficacy of an etchant used to prepare the surface of aluminum alloys for subsequent adhesive bonding.
An immunological method for quantization of Hevea Natural Rubber (HNRL) proteins using rabbit anti-HNRL serum. Rabbits immunized with HNRL proteins react to the majority of the proteins present, and their sera have the capability to detect most if not all the proteins in HNRL.
ASTM G65 measures the resistance of metallic materials to abrasion using the dry sand/rubber wheel apparatus. The quality, durability, and toughness of the sample are determined using this test. Metallic materials are ranked in their resistance to scratching abrasion under a controlled environment.
ASTM E2141 test methods provide accelerated aging and monitoring of the performance of time-dependent electrochromic devices (ECD) integrated in insulating glass units (IGU). This test helps to understand the relative serviceability of electrochromic glazings applied on ECD.
ASTM C724 test method is used in analyzing the quality and ease of maintenance of a ceramic decoration on architectural-type glass. This test method is useful in the acknowledgment of technical standards.
Loading Comments...
Send us a request
Process for testing
STEP 01
You share material and testing requirements with us
STEP 02
You ship your sample to us or arrange for us to pick it up.
STEP 03
We deliver the test report to your email.
Just share your testing requirements and leave the rest on us!
Free, no-obligation consultation
Guaranteed confidentiality
Quick turnaround time
Hassle-free process
Let us combine our capabilities to achieve success!!